Equipment
Photolithography
- OAI Model 204 mask aligner
- Quintel Q4000 mask aligner
- Laurell WS-400 spin coater
- Laurell WS-650 spin coater
- Brewer Science CEE spin developer
Plasma Etching
- March CS-1701 Plasma Etcher
Wet Processing
- Wet benches
- Spin rinse dryers
Metal Deposition
- Denton Explorer 14 sputter deposition system
- Filament-based thin-film evaporator
- Crucible-based thin-film evaporator
Thermal Processing
- Oxidation & diffusion furnace
- Anneal furnace
Metrology and Testing
- Signatone semiconductor probe stations
- HP4145 semiconductor parameter analyzers
- C-V test station
- Filmetrics F20-UV reflectometer
- NanoSpec 210 thin film reflectometers
- NanoSpec 4000 thin film reflectometer
- Filmetrics Profilm3D optical profiler
- Signatone four-point probe